3a-methyl-6a-n-propyl-1,3,4,6-tetramethoxymethyl glycolurea

CAS.220140-29-4 3a-methyl-6a-n-propyl-1,3,4,6-tetramethoxymethyl glycolurea

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Chemical Name: 3a-methyl-6a-n-propyl-1,3,4,6-tetramethoxymethyl glycolurea
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220140-29-4
singleproducttemplate
Molecular Type: C16H30N4O6
Product Category :

Use it as a crosslinking agent, mixed with an alkaline-soluble resin containing hydroxyl groups (or other active groups) (such as phenolic resins, hydroxystyrene copolymers) and a photoacid generator, for chemically amplified negative photoresist. This system can achieve high-resolution, high-etch resistance, and excellent thermal stability patterns, widely used in semiconductor manufacturing and MEMS processing.

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