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Cas No. 15243-33-1 Ruthenium carbonyl

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Chemical Name: Ruthenium carbonyl
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15243-33-1
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Molecular Type: C12O12Ru3
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Ruthenium carbonyl is chemically deposited through vapor deposition (CVD) or atomic layer deposition (ALD) to produce ruthenium thin films or ruthenium compound thin films, which are applied in the 3nm chip preparation process. It can also be used to make magnetic storage devices, magnetic sensors, and as a catalyst for synthesizing drugs.

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