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Cas No. 19824-59-0 Pentakis (dimethylamino) tantalum

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Chemical Name: Pentakis (dimethylamino) tantalum
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19824-59-0
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Molecular Type: C10H30N5Ta
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Pentakis (dimethylamino) tantalum can be used as a precursor for TaN, with excellent conductivity, and can be used in the manufacturing of electrode parts in semiconductor devices; Used as a diffusion barrier layer in semiconductor post processing; It can also be used for metallization of the positive electrode of photovoltaic cells; Used as a precursor for metal gate materials in CMOS processes below 45nm.

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