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Cas No. 3275-24-9 Tetrakis(dimethylamino)titanium

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Chemical Name: Tetrakis(dimethylamino)titanium
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3275-24-9
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Molecular Type: C2H7NTi
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Tetrakis(dimethylamino)titanium is currently a research hotspot in the fields of ALD and CVD. Can be used as a precursor material for TiO2. TiO2 is a very important high k and metal gate material in technologies below 32nm. It can be used as an electron transport layer material for n-type semiconductors, doped with other compounds to obtain a dielectric material with ultra-high dielectric constant and low dielectric loss. It is used in the manufacturing of small devices for capacitors and random dynamic storage.

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