Cas No. 15243-33-1 十二羰基三钌

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Chemical Name: 十二羰基三钌
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15243-33-1
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Molecular Type: C12O12Ru3
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十二羰基三钌通过气相沉积(CVD)或原子层沉积(ALD)等化学沉积，使用十二羰基三钌制造钌薄膜或钌化合物薄膜，应用于3nm芯片制备过程。还可用于制作磁性储存器件、磁传感器，作为催化剂合成药物等。

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